Πλοήγηση Επιστημονικές Δημοσιεύσεις Μελών ΠΘ (ΕΔΠΘ) ανά Συγγραφέα "Kachris, C."
-
A new SOI monolithic capacitive sensor for absolute and differential pressure measurements
Dimitropoulos, P. D.; Kachris, C.; Karampatzakis, D. P.; Stamoulis, G. I. (2005)In the present work, a new monolithic capacitive pressure sensor is being introduced. The sensor is manufactured according to a custom, 15-step SOI process. The process primarily offers great flexibility as far as sensor ...