• Discrete velocity modelling of gaseous mixture flows in MEMS 

      Naris, S.; Valougeorgis, D.; Sharipov, F.; Kalempa, D. (2004)
      The need of developing advanced micro-electro-mechanical systems (MEMS) has motivated the study of fluid-thermal flows in devices with micro-scale geometries. In many MEMS applications the Knudsen number varies in the range ...