On the nanocrystalline structure of TiC and TiB2 produced by laser ablation

Abstract

Thin films of TiC and TiB2 have been deposited on silicon substrate by pulsed laser deposition technique, under substrate temperatures 25 - 600 degrees C. Transmission electron microscopy revealed the nanocrystalline structure of the coatings. The grain size for the TiC film was between 10 and 70 nm and for the TiB2 film was between 10 and 50 nm.